✦ LIBER ✦

Formation of excellent shallow n+ junctions by As+ implantation into thin CoSi films on Si substrate

✍ Scribed by C.T. Lin; M.H. Juang; C.H. Chu; H.C. Cheng

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of silicided shallow n+

✍ M.H. Juang; H.C. Cheng 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 618 KB

Formation of shallow p+n junctions by im

✍ M.H. Juang; H.C. Cheng 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 411 KB

Shallow n+p junction formation by implan

✍ H.C. Cheng; M.H. Juang 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 607 KB

Formation of thin Si3N4 films by nitroge

✍ A.D. Yadav; M.C. Joshi 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 228 KB

Formation of thin Si3N4 films by nitroge

✍ A.D. Yadav; M.C. Joshi 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 30 KB

Formation of shallow p + n junctions by

📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 51 KB