𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Formation of double dielectric layers (Al2O3/SiO2) on silicon by D.C. plasma anodization

✍ Scribed by R.B Beck; A Jakubowski

Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
372 KB
Volume
97
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Sequential gas-phase formation of Al2O3
Sequential gas-phase formation of Al2O3 and SiO2 layers on aerosol-made TiO2 Particles
✍ Dr. George P. Fotou; Prof. Toivo T. Kodas πŸ“‚ Article πŸ“… 1997 πŸ› John Wiley and Sons 🌐 English βš– 333 KB πŸ‘ 2 views

E-28049 Madrid (Spain) [\*\*I This work has been carried out under the European contract No. CIl\*-CT94-003Y and Spanish CICYT project TIC96-0668. One of us (M.A.) gratefully acknowlcdges a F.P.U. fellowship from the Spanish Ministerio de Educacion y Ciencia.

Investigation of plasma interaction with
Investigation of plasma interaction with carbon impurities on SiO2- and Al2O3 surfaces by EPR-, Mass- and emission spectroscopy
✍ Doz. Dr. H.-J. Tiller; Dr. F.-W. Breitbarth; Dipl.-Chem. B. Langguth; Dipl. Phys πŸ“‚ Article πŸ“… 1981 πŸ› John Wiley and Sons 🌐 English βš– 368 KB πŸ‘ 2 views

Carbon impurities on highly disperse SiO, and AhO, are detected by their interaction with low pressure plasmas, with aid of mass-, emissionand epr-spectroscopic methods. The formation of surface defects on SiO, by plasma treatment is strongly influenced by these impurities. Some of these defects are