Carbon impurities on highly disperse SiO, and AhO, are detected by their interaction with low pressure plasmas, with aid of mass-, emissionand epr-spectroscopic methods. The formation of surface defects on SiO, by plasma treatment is strongly influenced by these impurities. Some of these defects are
✦ LIBER ✦
Properties of Al2O3 and SiO2 surface layers on InSb, investigated by backscattering techniques
✍ Scribed by K. Schmid; H. Ryssel; H. Müller; K.H. Wiedeburg; H. Betz
- Publisher
- Elsevier Science
- Year
- 1973
- Tongue
- English
- Weight
- 111 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.
📜 SIMILAR VOLUMES
Investigation of plasma interaction with
✍
Doz. Dr. H.-J. Tiller; Dr. F.-W. Breitbarth; Dipl.-Chem. B. Langguth; Dipl. Phys
📂
Article
📅
1981
🏛
John Wiley and Sons
🌐
English
⚖ 368 KB
👁 2 views
Formation of double dielectric layers (A
✍
R.B Beck; A Jakubowski
📂
Article
📅
1982
🏛
Elsevier Science
🌐
English
⚖ 372 KB
Characterization of surface layer in Si/
✍
K. Egami; M. Mikami; M. Kimura; H. Tsuya; T. Hamaguchi
📂
Article
📅
1985
🏛
Elsevier Science
🌐
English
⚖ 323 KB
Crystallographic and magnetic properties
✍
Sung Ho Lee; Seung Han Choi; Jin Duk Chung
📂
Article
📅
1992
🏛
Elsevier Science
🌐
English
⚖ 325 KB
Electrical properties of Al2O3 and AlPxO
✍
L.G. Meiners
📂
Article
📅
1984
🏛
Elsevier Science
🌐
English
⚖ 525 KB
Sequential gas-phase formation of Al2O3
✍
Dr. George P. Fotou; Prof. Toivo T. Kodas
📂
Article
📅
1997
🏛
John Wiley and Sons
🌐
English
⚖ 333 KB
👁 2 views
E-28049 Madrid (Spain) [\*\*I This work has been carried out under the European contract No. CIl\*-CT94-003Y and Spanish CICYT project TIC96-0668. One of us (M.A.) gratefully acknowlcdges a F.P.U. fellowship from the Spanish Ministerio de Educacion y Ciencia.