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Investigation of MIS structures with Al2O3 insulation layers obtained by d.c. reactive sputtering

✍ Scribed by K.I. Kirov; E.D. Atanasova; N.A. Ivanov


Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
160 KB
Volume
41
Category
Article
ISSN
0040-6090

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