✦ LIBER ✦
An ellipsometric study of SiO2/Si3N4 double layers on silicon produced by chemical vapour deposition
✍ Scribed by H.W. Dinges
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 221 KB
- Volume
- 78
- Category
- Article
- ISSN
- 0040-6090
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