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Formation of cobalt silicide films by ion beam deposition

✍ Scribed by Y. Zhang; D.E. McCready; C.M. Wang; J. Young; M.I. McKinley; H.J. Whitlow; A. Razpet; G. Possnert; T. Zhang; Y. Wu

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 201 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.134

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