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Epitaxial silicide formation by electron beam annealing of nickel thin films

✍ Scribed by RE Harper; EA Maydell-Ondrusz; IH Wilson; KG Stephens

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 501 KB
Volume: 34
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(84)90167-2

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