An ion beam deposition system to produce isotopically pure epitaxial thin films of different materials has been designed and built. Using negative ions, problems due to mass interference with molecular ions could be significantly reduced, thus allowing the production, for instance, of 29 Si films of
โฆ LIBER โฆ
Formation of Thin Au Films Using Negative-Ion-Beam Deposition
โ Scribed by Heck, C. ;Chayahara, A. ;Tsubouchi, N. ;Horino, Y. ;Fujii, K. ;Iwami, M. ;Abiko, K.
- Publisher
- John Wiley and Sons
- Year
- 1997
- Tongue
- English
- Weight
- 299 KB
- Volume
- 160
- Category
- Article
- ISSN
- 0031-8965
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The purpose of this work was to study surface diffusion of atoms in Au-Ag films deposited on SiO 2 substrate under the action of a d.c. field, focusing on the effect of chemical reaction at the Au-Ag/SiO 2 interface on the electromigration behaviour. Atomic force microscopy measurement depicted the