✦ LIBER ✦

Improved thermal stability of cobalt silicide formed by ion beam assisted deposition on polysilicon

✍ Scribed by S. Ravesi; F. La Via; V. Raineri; C. Spinella

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Zr-silicide formation during the epitaxi

✍ T. Koch; P. Ziemann 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 672 KB

Improvement of thermal stability of Ni s

✍ Kazuo Tsutsui; Takashi Shiozawa; Koji Nagahiro; Yoshihisa Ohishi; Kuniyuki Kakus 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 479 KB