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Formation, evolution and annihilation of interstitial clusters in ion implanted Si

✍ Scribed by Sebania Libertino; Salvatore Coffa; Janet L Benton; Kim Halliburton; David J Eaglesham

Book ID: 114170738
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 151 KB
Volume: 148
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00792-7

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