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Focused boron ion beam implantation into silicon

✍ Scribed by M. Tamura; S. Shukuri; M. Ichikawa; Y. Wada; T. Ishitani

Book ID: 113277194
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 655 KB
Volume: 7-8
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(85)90483-5

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