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Focused phosphorus ion beam implantation into silicon

✍ Scribed by Y. Madokoro; S. Shukuri; K. Umemura; M. Tamura

Book ID: 113280227
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 510 KB
Volume: 39
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(89)90837-9

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