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Implants of 15–50 MeV Boron ions into silicon

✍ Scribed by A. la Ferla; A. Di Franco; E. Rimini; G. Ciavola; G. Ferla

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 369 KB
Volume: 2
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(89)90078-0

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