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Failure physics of ultra-thin SiO 2 gate oxides near their scaling limit

✍ Scribed by Suñé, J; Nafría, M; Miranda, E; Oriols, X; Rodríguez, R; Aymerich, X

Book ID: 127013295
Publisher: Institute of Physics
Year: 2000
Tongue: English
Weight: 158 KB
Volume: 15
Category: Article
ISSN: 0268-1242
DOI: 10.1088/0268-1242/15/5/303

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