Fabrication of superlattice structures by plasma controlled magnetron sputtering
โ Scribed by T. Hata; K. Kamiya; Y. Kamide; S. Horita
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 317 KB
- Volume
- 163
- Category
- Article
- ISSN
- 0040-6090
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