Fabrication of uniform porous alumina materials by radio frequency (RF) magnetron sputtering

✍ Scribed by YueFeng Tang; Jun Qi; ZhengBin Gu; ZhiPeng Huang; AiDong Li; YanFeng Chen

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 411 KB
• Volume: 254
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.08.031

✦ Synopsis

Fabrication of porous materials with uniform pore size distribution remains a challenge. In this paper, a kind of uniform porous alumina material was fabricated on a template of polystyrene microspheres by radio frequency (RF) magnetron sputtering. Surface of samples was observed by scanning electron microscopy (SEM), and the phase of porous materials was confirmed by X-ray diffraction (XRD). The pore size distribution of samples was tested by mercury intrusion method.