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Plasma-emission-controlled d.c. magnetron sputtering of TiO2-x thin films

โœ Scribed by A. Brudnik; H. Czternastek; K. Zakrzewska; M. Jachimowski


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
656 KB
Volume
199
Category
Article
ISSN
0040-6090

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