✦ LIBER ✦

Fabrication of piezoelectric AlN thin film for FBARs

✍ Scribed by Wei-Kuo Liu; Kok-Wan Tay; Sin-Cha Kuo; Menq-Jion Wu

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Piezoelectric thin AlN films for bulk ac

✍ H.P Loebl; M Klee; C Metzmacher; W Brand; R Milsom; P Lok 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 94 KB

Two-step reactive sputtering of piezoele

✍ J.S. Cherng; C.M. Lin; T.Y. Chen 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 474 KB

Electro-mechanical coupling in shear-mod

✍ Milyutin, E.; Muralt, P. 📂 Article 📅 2011 🏛 IEEE 🌐 English ⚖ 520 KB

Design of piezoelectric thin films in th

✍ C. Kunisch; H. Holleck 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 368 KB

Fabrication of AlN slender piezoelectric

✍ A.T. Tran; G. Pandraud; H. Schellevis; T. Alan; V. Aravindh; O. Wunnicke; P.M. S 📂 Article 📅 2011 🏛 Elsevier 🌐 English ⚖ 650 KB

Synthesis of textured thin piezoelectric

✍ Bjurstrom, Johan; Wingqvist, Gunilla; Katardjiev, Ilia 📂 Article 📅 2006 🏛 IEEE 🌐 English ⚖ 723 KB