Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film

✍ Scribed by Milyutin, E.; Muralt, P.

• Book ID: 119823886
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 520 KB
• Volume: 58
• Category: Article
• ISSN: 0885-3010
• DOI: 10.1109/tuffc.2011.1860