Fabrication of AlN slender piezoelectric cantilevers for highspeed MEMS actuations

✍ Scribed by A.T. Tran; G. Pandraud; H. Schellevis; T. Alan; V. Aravindh; O. Wunnicke; P.M. Sarro

• Book ID: 119355641
• Publisher: Elsevier
• Year: 2011
• Tongue: English
• Weight: 650 KB
• Volume: 25
• Category: Article
• ISSN: 1877-7058
• DOI: 10.1016/j.proeng.2011.12.166