✦ LIBER ✦
Enhancement of AlN Slender Piezoelectric Cantilevers Actuation by PECVD Silicon Nitride Coating
✍ Scribed by Tran, A.T.; Pandraud, G.; Schellevis, H.; Sarro, P.M.
- Book ID
- 123589674
- Publisher
- Elsevier
- Year
- 2012
- Tongue
- English
- Weight
- 589 KB
- Volume
- 47
- Category
- Article
- ISSN
- 1877-7058
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