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Fabrication of conducting AFM cantilevers with AlN-based piezoelectric actuators

✍ Scribed by H.J. Quenzer; U. Drechsler; A. Sebastian; S. Marauska; B. Wagner; M. Despont

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Fabrication of AlN slender piezoelectric

✍ A.T. Tran; G. Pandraud; H. Schellevis; T. Alan; V. Aravindh; O. Wunnicke; P.M. S 📂 Article 📅 2011 🏛 Elsevier 🌐 English ⚖ 650 KB

Pre-stressed piezoelectric bimorph micro

✍ Wilson, S A; Jourdain, R P; Owens, S 📂 Article 📅 2010 🏛 Institute of Physics 🌐 English ⚖ 745 KB