✦ LIBER ✦
Pre-stressed piezoelectric bimorph micro-actuators based on machined 40 µm PZT thick films: batch scale fabrication and integration with MEMS
✍ Scribed by Wilson, S A; Jourdain, R P; Owens, S
- Book ID
- 120734355
- Publisher
- Institute of Physics
- Year
- 2010
- Tongue
- English
- Weight
- 745 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0964-1726
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