Synthesis of textured thin piezoelectric AlN films with a nonzero C-axis mean tilt for the fabrication of shear mode resonators

✍ Scribed by Bjurstrom, Johan; Wingqvist, Gunilla; Katardjiev, Ilia

• Book ID: 120062626
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 723 KB
• Volume: 53
• Category: Article
• ISSN: 0885-3010
• DOI: 10.1109/TUFFC.2006.149