Quasi-thickness-shear waves in thin-film piezoelectric resonators of ZnO and AlN with tilted C-Axis

✍ Scribed by Xiaoshan Cao, ; Feng Jin, ; Jiashi Yang,

• Book ID: 120319219
• Publisher: IEEE
• Year: 2012
• Tongue: English
• Weight: 611 KB
• Volume: 59
• Category: Article
• ISSN: 0885-3010
• DOI: 10.1109/TUFFC.2012.2485