Fabrication of nanostructures with long-range order using block copolymer lithography

✍ Scribed by Cheng, J. Y.; Ross, C. A.; Thomas, E. L.; Smith, Henry I.; Vancso, G. J.

• Book ID: 120484761
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 566 KB
• Volume: 81
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1519356