✦ LIBER ✦
Fabrication of highly ordered sub-20 nm silicon nanopillars by block copolymer lithography combined with resist design
✍ Scribed by Salaun, Mathieu; Zelsmann, Marc; Archambault, Sophie; Borah, Dipu; Kehagias, Nikolaos; Simao, Claudia; Lorret, Olivier; Shaw, Matthew T.; Sotomayor Torres, Clivia M.; Morris, Mickael A.
- Book ID
- 120590879
- Publisher
- The Royal Society of Chemistry
- Year
- 2013
- Tongue
- English
- Weight
- 886 KB
- Volume
- 1
- Category
- Article
- ISSN
- 2050-7526
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