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Fabrication of microstructures for quantum devices using focused ion beam gas-assisted etching

✍ Scribed by Y. Ochiai; R.J. Young; J.R.A. Cleaver; H. Ahmed; T. Baba

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 279 KB
Volume: 13
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(91)90120-3

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