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Gas-assisted focused ion beam etching for microfabrication and inspection

✍ Scribed by R.J. Young; J.R.A. Cleaver; H. Ahmed

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
370 KB
Volume
11
Category
Article
ISSN
0167-9317

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✍ G. Villanueva; J.A. Plaza; A. SΓ‘nchez-Amores; J. Bausells; E. MartΓ­nez; J. Samit πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 281 KB

We have studied the fabrication of high-aspect ratio silicon tips by a combination of deep reactive ion etching and focused ion beam. The reactive ion etching is used to obtain so-called "rocket tips" which can be fabricated with a high aspect ratio. The rocket tips are further processed by using a