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Fabrication of micro-coils using laser scan lithography on copper pipes

✍ Scribed by Yoshihisa Kaneko; Kohei Hashimoto; Toshiyuki Horiuchi

Book ID
108207591
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
618 KB
Volume
83
Category
Article
ISSN
0167-9317

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Nickel micro-gears were fabricated using optical projection lithography on copper-clad plastic substrates and nickel electroplating. Adopting low numerical-aperture projection exposure, large depth-of-focus was secured, and SU-8 resist moulds with vertical sidewalls were fabricated. In addition, cos