Micro-gear fabrication using optical projection lithography on copper-clad plastic substrates and electroplating of nickel
✍ Scribed by Toshiyuki Horiuchi; Yusuke Furuuchi; Ryota Nakamura; Katsunori Hirota
- Book ID
- 104050512
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 403 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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✦ Synopsis
Nickel micro-gears were fabricated using optical projection lithography on copper-clad plastic substrates and nickel electroplating. Adopting low numerical-aperture projection exposure, large depth-of-focus was secured, and SU-8 resist moulds with vertical sidewalls were fabricated. In addition, cost was greatly reduced by using copper-clad plastic substrates instead of silicon wafers. After nickel was electroplated in nickel sulfate solution, nickel gears with modules of 0.026-0.04 and pitch diameters of 760-1100 lm were stripped from the substrates when the resist moulds were dissolved in hot remover.