✦ LIBER ✦
Laser lithography using a half-vacuum support guide for fabricating micro-coils
✍ Scribed by Toshiyuki Horiuchi; Hidetoshi Ishii; Yasuhide Shinozaki; Tetsuya Ogawa
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 746 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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