Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

✍ Scribed by Forsén, E; Nilsson, S G; Carlberg, P; Abadal, G; Pérez-Murano, F; Esteve, J; Montserrat, J; Figueras, E; Campabadal, F; Verd, J; Montelius, L; Barniol, N; Boisen, A

• Book ID: 120610007
• Publisher: Institute of Physics
• Year: 2004
• Tongue: English
• Weight: 337 KB
• Volume: 15
• Category: Article
• ISSN: 0957-4484
• DOI: 10.1088/0957-4484/15/10/021