✦ LIBER ✦
Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask
✍ Scribed by Yigui Li; Susumu Sugiyama
- Publisher
- Springer-Verlag
- Year
- 2006
- Tongue
- English
- Weight
- 431 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0946-7076
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