Fabrication of high efficiency SOI taper structures

✍ Scribed by Thorsten Wahlbrink; Wan Shao Tsai; Michael Waldow; Michael Först; Jens Bolten; Thomas Mollenhauer; Heinrich Kurz

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 401 KB
• Volume: 86
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.01.047

✦ Synopsis

A taper technique is presented which utilizes micrometer-scale SU8 waveguides to couple light into nanometre-scale silicon waveguides with high conversion efficiency. The conversion efficiency between the fibre and the silicon waveguide is investigated for different taper lengths and silicon waveguide taper tip widths. Maximum coupling efficiency is ascertained to be about 60% per coupler. The 3 dB bandwidth of the presented structure is determined to be well above 100 nm.