CMOS compatible cost-efficient fabrication of SOI grating couplers

✍ Scribed by Jens Bolten; Jens Hofrichter; Nikolaj Moll; Sophie Schönenberger; Folkert Horst; Bert J. Offrein; Thorsten Wahlbrink; Thomas Mollenhauer; Heinrich Kurz

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 404 KB
• Volume: 86
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.11.038