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Fabrication of high aspect ratio sub-micron structures by variable-shape electron lithography

✍ Scribed by T.S. Norris; G.A.C. Jones; H. Ahmed

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 812 KB
Volume: 3
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(85)90013-9

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