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Fabrication of grids and collimators using SU-8 as a mold

✍ Scribed by O. V. Makarova; V. N. Zyryanov; R. Divan; D. C. Mancini; C.-M. Tang

Publisher: Springer-Verlag
Year: 2004
Tongue: English
Weight: 263 KB
Volume: 10
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-004-0388-1

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