✦ LIBER ✦
Different methods for the fabrication of UV-LIGA molds using SU-8 with tapered de-molding angles
✍ Scribed by C. Fu; H. Huang
- Publisher
- Springer-Verlag
- Year
- 2006
- Tongue
- English
- Weight
- 481 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0946-7076
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