✦ LIBER ✦
Fabrication of a freestanding micro mechanical structure using electroplated thick metal with a HAR SU-8 mold
✍ Scribed by Jin Seung Lee; Seung S. Lee
- Publisher
- Springer-Verlag
- Year
- 2008
- Tongue
- English
- Weight
- 750 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0946-7076
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