✦ LIBER ✦
In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer
✍ Scribed by Z. Ling; K. Lian
- Publisher
- Springer-Verlag
- Year
- 2006
- Tongue
- English
- Weight
- 323 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0946-7076
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