Fabrication of a spiral microcoil using a 3D-LIGA process
β Scribed by Harutaka Mekaru; Shinji Kusumi; Noriaki Sato; Masami Shimizu; Michiru Yamashita; Osamu Shimada; Tadashi Hattori
- Publisher
- Springer-Verlag
- Year
- 2006
- Tongue
- English
- Weight
- 614 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0946-7076
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