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Fabrication of a spiral microcoil using a 3D-LIGA process

✍ Scribed by Harutaka Mekaru; Shinji Kusumi; Noriaki Sato; Masami Shimizu; Michiru Yamashita; Osamu Shimada; Tadashi Hattori


Publisher
Springer-Verlag
Year
2006
Tongue
English
Weight
614 KB
Volume
13
Category
Article
ISSN
0946-7076

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