✦ LIBER ✦
Fabrication of sub-micron 3-D structure using duo-mold UV-RIL process
✍ Scribed by Kang-Soo Han; Sung-Hoon Hong; Jun-Ho Jeong; Heon Lee
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 373 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.