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Fabrication and testing of chemically micromachined silicon echelle gratings

โœ Scribed by Keller, Luke D. ;Jaffe, Daniel T. ;Ershov, Oleg A. ;Benedict, Thomas ;Graf, Urs U.

Book ID
115348615
Publisher
The Optical Society
Year
2000
Tongue
English
Weight
530 KB
Volume
39
Category
Article
ISSN
1559-128X

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## Abstract In this work, we used HNO~3~/HF Vapour Etching (VE) of silicon (Si) wafers for the formation of different porous structures. Depending on the volume ratio of the HNO~3~/HF acid mixture, we can obtain Porous Silicon (PS) layers or a (NH~4~)~2~SiF~6~ like powder phase. These two kind of p