𝔖 Bobbio Scriptorium

✦ LIBER ✦

Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications

✍ Scribed by Chien-Hung Wu, ; Zorman, C.A.; Mehregany, M.

Book ID: 120183683
Publisher: IEEE
Year: 2006
Tongue: English
Weight: 978 KB
Volume: 6
Category: Article
ISSN: 1530-437X
DOI: 10.1109/JSEN.2006.870145

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Application of protective chemically vap

Application of protective chemically vapor deposited coatings on continuous high strength silicon carbide and tungsten filaments for the fabrication of high temperature composites

✍ I. Ahmad; W.J. Heffernan; D.N. Hill 📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 36 KB

Microscopic mapping of specific contact

Microscopic mapping of specific contact resistances and long-term reliability tests on 4H-silicon carbide using sputtered titanium tungsten contacts for high temperature device applications

✍ Lee, S.-K.; Zetterling, C.-M.; Ostling, M. 📂 Article 📅 2002 🏛 American Institute of Physics 🌐 English ⚖ 586 KB

[IEEE 2010 IEEE International Conference

[IEEE 2010 IEEE International Conference on Industrial Technology - Vi a del Mar , Chile (2010.03.14-2010.03.17)] 2010 IEEE International Conference on Industrial Technology - Fabrication and characterization of piezoresistive strain sensors for high temperature applications

✍ Fraga, M. A.; Furlan, H.; Wakavaiachi, S. M.; Massi, M. 📂 Article 📅 2010 🏛 IEEE ⚖ 853 KB

[IEEE International Solid State Sensors

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A silicon pressure sensor with stainless diaphragm for high temperature and chemical application

✍ Terabe, H.; Arashima, H.; Ura, N.; Suzuki, K.; Ohta, K.; Ishida, M. 📂 Article 📅 1997 🏛 IEEE ⚖ 581 KB