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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A silicon pressure sensor with stainless diaphragm for high temperature and chemical application

✍ Scribed by Terabe, H.; Arashima, H.; Ura, N.; Suzuki, K.; Ohta, K.; Ishida, M.

Book ID: 121756957
Publisher: IEEE
Year: 1997
Weight: 581 KB
Volume: 2
Category: Article
ISBN-13: 9780780338296
DOI: 10.1109/SENSOR.1997.635745

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