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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Power MEMS and microengines

✍ Scribed by Epstein, A.H.; Senturia, S.D.; Anathasuresh, G.; Ayon, A.; Breuer, K.; Chen, K.-S.; Ehrich, F.; Gauba, G.; Ghodssi, R.; Groshenry, C.; Jacobson, S.; Lang, J.; Mehra, C.-C.; Mur Miranda, J.; Nagle, S.; Orr, D.; Piekos, E.; Schmidt, M.; Shirley, G.; Spearing, S.; Tan, C.; Tzeng, Y.-S.; Waitz, I.

Book ID: 120662672
Publisher: IEEE
Year: 1997
Weight: 604 KB
Volume: 2
Category: Article
ISBN-13: 9780780338296
DOI: 10.1109/SENSOR.1997.635209

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