𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Materials reliability in MEMS devices

✍ Scribed by Brown, S.B.; van Arsdell, W.; Muhlstein, C.L.

Book ID: 120648111
Publisher: IEEE
Year: 1997
Weight: 629 KB
Volume: 1
Category: Article
ISBN-13: 9780780338296
DOI: 10.1109/SENSOR.1997.613720

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE International Solid State Sensors

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Power MEMS and microengines

✍ Epstein, A.H.; Senturia, S.D.; Anathasuresh, G.; Ayon, A.; Breuer, K.; Chen, K.- 📂 Article 📅 1997 🏛 IEEE ⚖ 604 KB

[IEEE International Solid State Sensors

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Electronics for micromachined inertial sensors

✍ Boser, B.E. 📂 Article 📅 1997 🏛 IEEE ⚖ 472 KB

[IEEE International Solid State Sensors

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - An innovative Pirani pressure sensor

✍ Chou, B.C.S.; Jin-Shown Shie, 📂 Article 📅 1997 🏛 IEEE ⚖ 422 KB

[IEEE International Solid State Sensors

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Development of micromachined switches with increased reliability

✍ Hiltmann, K.M.; Schmidt, B.; Sandmaier, H.; Lang, W. 📂 Article 📅 1997 🏛 IEEE ⚖ 609 KB

[IEEE International Solid State Sensors

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Thermal buckling actuator for micro relays

✍ Seki, T.; Sakata, M.; Nakajima, T.; Matsumoto, M. 📂 Article 📅 1997 🏛 IEEE ⚖ 335 KB

[IEEE International Solid State Sensors

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Resistive damping of pulse-sensed capacitive position sensors

✍ Varghese, M.; Amantea, R.; Sauer, D.; Senturia, S.D. 📂 Article 📅 1997 🏛 IEEE ⚖ 384 KB