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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A bulk micromachined silicon angular rate sensor

✍ Scribed by Kuisma, H.; Ryhanen, T.; Lahdenpera, J.; Punkka, E.; Ruotsalainen, S.; Sillanpaa, T.; Seppa, H.

Book ID: 125502907
Publisher: IEEE
Year: 1997
Weight: 567 KB
Volume: 2
Category: Article
ISBN-13: 9780780338296
DOI: 10.1109/SENSOR.1997.635241

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