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Fabrication and characterization of nanoscale resonant gratings on thin silicon membrane

✍ Scribed by Wang, Yongjin; Kanamori, Yoshiaki; Ye, Jiasheng; Sameshima, Hidehisa; Hane, Kazuhiro

Book ID
115410831
Publisher
Optical Society of America
Year
2009
Tongue
English
Weight
752 KB
Volume
17
Category
Article
ISSN
1094-4087

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## Abstract In this paper, fully integrated film bulk acoustic resonators (FBARs) and filter have been designed, fabricated, and characterized by using silicon bulk micromachining technology. The fabricated resonator is comprised of aluminum nitride (AlN) piezoelectric material sandwiched by two mo